SEMI E138 : 2017

Name: SEMI E138 : 2017
Brand: SEMI

Superseded

SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS

Superseded date

06-04-2019

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the representation of Error, Data Types, Data Value Types, and Unit which are considered common components.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI E138-0319

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SEMI E121 : 2017	GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
SEMI E132 : 2015	SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION
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SEMI E145 : 2014	CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML

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