SEMI E138-0319
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for XML Semiconductor Common Components
Available format(s)
Hardcopy
Language(s)
English
Published date
06-04-2019
Superseded date
11-03-2024
Superseded by
€125.00
Excluding VAT
This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components.
| DocumentType |
Revision
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E179:2023 | Specification for Protocol Buffers Common Components |
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