SEMI E138-0319
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for XML Semiconductor Common Components
Available format(s)
Hardcopy
Superseded date
11-03-2024
Superseded by
Language(s)
English
Published date
06-04-2019
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components.
| DocumentType |
Revision
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E179:2023 | Specification for Protocol Buffers Common Components |
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