SEMI E139 : 2013
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP)
Published date
12-01-2013
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Describes the cooperative interaction between the Factory Information & Control System (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005) Includes SEMI E139.1, SEMI E139.2 & SEMI E139.3. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E30 : 2018 | SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E139.2 : 2008 | SECS-2 PROTOCOL FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
| SEMI E149 : 2014 | GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT |
| SEMI E120 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
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