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SEMI E120 : 2014

SEMI E120 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)

Superseded date

15-10-2022

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a generally applicable object model of semiconductor equipment structure and related elements. This object model is intended to be used in the following ways: - As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host; - As a base model to be used and extended by other SEMI equipment communication standards; - As a reference for the creation of technology-specific object model definitions, such as XML schema.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2004) Includes SEMI E120.1. (03/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E169 : 2015 GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY
SEMI E160 : 2011(R2017) SPECIFICATION FOR COMMUNICATION OF DATA QUALITY
SEMI E151 : 2011(R2017) GUIDE FOR UNDERSTANDING DATA QUALITY
SEMI E157 : 2011(R2016) SPECIFICATION FOR MODULE PROCESS TRACKING
SEMI E125 : 2014 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E164 : 2014 SPECIFICATION FOR EDA COMMON METADATA
SEMI E139 : 2013 SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP)
SEMI E147 : 2007E GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)
SEMI E125.1 : 2014 SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E148 : 2009(R2014) SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT
SEMI E127 : 2008 SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)

SEMI E121 : 2017 GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS

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