SEMI E14 : 1993
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
01-03-2003
12-01-2013
Covers, procedures, methods and application of a technique for the determination of average particle numbers added to a wafer when the wafer is passed through a semiconductor process tool. Providing a standardized methodology and procedure for the measurement of contamination performance of a particular tool or process in terms of the number and size distribution of particles added to a silicon wafer resulting from being passed through the process tool.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Withdrawn
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