Name: SEMI E151 : 2011(R2017)
Brand: SEMI

GUIDE FOR UNDERSTANDING DATA QUALITY

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies common terminology and definitions that can be used when addressing the quality of semiconductor equipment generated data.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (12/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E160 : 2011(R2017)	SPECIFICATION FOR COMMUNICATION OF DATA QUALITY
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SEMI E92 : 2002E(R2015)	SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT)
SEMI E168 : 2015	SPECIFICATION FOR PRODUCT TIME MEASUREMENT

SEMI E54 : 2016	SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
SEMI E134 : 2014	SPECIFICATION FOR DATA COLLECTION MANAGEMENT
SEMI E120 : 2014	SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
SEMI E125 : 2014	SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E14 : 1993	MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
SEMI E132 : 2015	SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION

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SEMI E151 : 2011(R2017)