SEMI E145:2014(R2019)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Classification for Measurement Unit Symbols in XML
Available format(s)
Hardcopy
Superseded date
11-03-2024
Superseded by
Language(s)
English
Published date
01-05-2019
Important note : Users cannot be edited or removed once added to your Multi user PDF.The inclusion of extensible markup language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E5 : 2019 | Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
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