SEMI E149 : 2014
Current
Current
The latest, up-to-date edition.
GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT
Published date
12-01-2013
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Presents recommendations for content and usability of documentation provided by the equipment supplier to the equipment purchaser for acquisition and use of semiconductor, flat panel display (FPD), or other related manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E35 : 2012 | GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E150 : 2014 | GUIDE FOR EQUIPMENT TRAINING BEST PRACTICES |
| SEMI E161 : 2011 | GUIDE FOR IDENTIFICATION AND CLASSIFICATION OF TRAINING TIERS |
| SEMI S23 : 2016 | GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
| SEMI E33 : 2017 | GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT ELECTROMAGNETIC COMPATIBILITY (EMC) |
| SEMI E36 : 2004 | SEMICONDUCTOR EQUIPMENT MANUFACTURING INFORMATION TAGGING SPECIFICATION |
| SEMI E72 : 2016 | SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT |
| SEMI E150 : 2014 | GUIDE FOR EQUIPMENT TRAINING BEST PRACTICES |
| SEMI S16 : 2007(R2012) | GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT DESIGN FOR REDUCTION OF ENVIRONMENTAL IMPACT AT END OF LIFE |
| SEMI S13 : 2013 | ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH MANUFACTURING EQUIPMENT |
| SEMI E139 : 2013 | SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
| SEMI E70 : 2013 | GUIDE FOR TOOL ACCOMMODATION PROCESS |
| SEMI E76 : 1999(R2013) | GUIDE FOR 300 MM PROCESS EQUIPMENT POINTS OF CONNECTION TO FACILITY SERVICES |
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