SEMI E157 : 2011(R2016)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR MODULE PROCESS TRACKING
Superseded date
05-04-2024
Superseded by
Published date
12-01-2013
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Describes a standard equipment capability to report process-related data to the factory system.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2010)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E168 : 2015 | SPECIFICATION FOR PRODUCT TIME MEASUREMENT |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E120 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E139 : 2013 | SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
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