SEMI E167 : 2013
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR EQUIPMENT ENERGY SAVING MODE COMMUNICATIONS (EESM)
Published date
14-01-2014
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Describes message services and behavior between the host and production equipment to facilitate a reduced rate of energy consumption in the production equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Includes SEMI E167.1. (12/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E175 : 2016 | SPECIFICATION FOR SUBSYSTEM ENERGY SAVING MODE COMMUNICATION (SESMC) |
| SEMI S23 : 2016 | GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT |
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