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SEMI E171 : FEB 2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)
10-06-2024
06-10-2014
Pertains to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones.
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