SEMI E175 : 2016
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SUBSYSTEM ENERGY SAVING MODE COMMUNICATION (SESMC)
Published date
06-12-2016
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Specifies communication between production equipment and the subsystem to enable energy saving mode (reduced energy consumption rate) operation by using sleep level transitions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2016)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI S23 : 2016 | GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E167 : 2013 | SPECIFICATION FOR EQUIPMENT ENERGY SAVING MODE COMMUNICATIONS (EESM) |
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