SEMI E21 : 2015
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT
Published date
12-01-2013
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Specifies the interface plane between modules in a cluster tool.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E21.1. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E24 : 1992(R2004) | CLUSTER TOOL MODULE INTERFACE: ISOLATION VALVE INTERLOCKS STANDARD |
| SEMI E22 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME |
| SEMI E20 : 1997(R2002) | CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND EMERGENCY OFF STANDARD |
| SEMI E21.1 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: MECHANICAL INTERFACE AND WAFER TRANSPORT |
| SEMI E166 : 2014 | SPECIFICATION FOR 450 MM CLUSTER MODULE INTERFACE: MECHANICAL INTERFACE AND TRANSPORT STANDARD |
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