SEMI E22.1 : 2015
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME
Published date
12-01-2013
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Specifies the range of SEMI E22 to include 300 mm diameter wafers. Also provides 300 mm compatible values for all the parameters defined in SEMI E22, and defines some additional parameters.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Not available separately, Published within the SEMI E22 family of standards. (02/2009)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E22 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME |
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