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SEMI E1-9 : NOV 2006E

SEMI E1-9 : NOV 2006E

Current

Current

The latest, up-to-date edition.

MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. Also intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005) Also available in CD-ROM. (07/2006) E = This standard was editorially modified to remove a withdrawn document reference. (12/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI M49 : 2016 GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 16 NM TECHNOLOGY GENERATIONS
SEMI E100 : 2004(R2010) SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES
SEMI E99 : 2017 SPECIFICATION FOR CARRIER ID READER/WRITER
SEMI G77 : 1999(R2015) SPECIFICATION FOR FRAME CASSETTE FOR 300 MM WAFERS
SEMI M29 : 1996(R2010) SPECIFICATION FOR 300 MM SHIPPING BOX
SEMI E22.1 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME
SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
SEMI E22 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME
SEMI E119 : JUL 2006(R2012) MECHANICAL SPECIFICATION FOR REDUCED-PITCH FRONT-OPENING BOX FOR INTERFACTORY TRANSPORT OF 300 MM WAFERS
SEMI E92 : 2002E(R2015) SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT)
SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
SEMI E85 : 2008(R2013) SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY
SEMI M31 : 2008 MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS
SEMI E131 : 2004(R2010) SPECIFICATION FOR THE PHYSICAL INTERFACE OF AN INTEGRATED MEASUREMENT MODULE (IMM) INTO 300 MM TOOLS USING BOLTS-M
SEMI E15-1 : 2005(R2010) SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
SEMI M52 : 2014 GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS
SEMI E84 : 2009(R2017) SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE
SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E159 : 2014 MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS
SEMI E152 : 2014 MECHANICAL SPECIFICATION OF EUV POD FOR 150 MM EUVL RETICLES
SEMI E103 : 2004 MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP

SEMI E19 : APR 2017 SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)
SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT

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