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SEMI E22.1 : 2015

SEMI E22.1 : 2015

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the range of SEMI E22 to include 300 mm diameter wafers. Also provides 300 mm compatible values for all the parameters defined in SEMI E22, and defines some additional parameters.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Not available separately, Published within the SEMI E22 family of standards. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS

SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E22 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME

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