SEMI E30 : 2018
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
Superseded date
05-10-2020
Superseded by
Published date
12-01-2013
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Specifies a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2007) SEMI E30.1 & SEMI E30.5 are no longer published within the SEMI E30 family of standards, Published and sold separately on their own pages. (07/2010)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E23 : 2004(R2010) | SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE |
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
| SEMI E139 : 2013 | SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
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