SEMI E32 : 1997
Current
The latest, up-to-date edition.
MATERIAL MOVEMENT MANAGEMENT (MMM)
12-01-2013
The main document addresses the communications needs of semiconductor manufacturing facilities in respect of material movement. Covering automated material movement on the semiconductor factory floor, transporting objects/material from one storage or processing location to another. It defines the concept of material movement; equipment behavior in relation to material movement and messaging services needed to complete the task. The subordinate document SEMI E32.1 "SECS-II Support for Material Movement" contains information for implementing the Material Movement Management Standard E32 using the SEMI E5 SECS-II communications protocol.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
| SEMI E82 : 2006(R2018) | SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM) |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
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