SEMI E41 : 1995
Current
The latest, up-to-date edition.
EXCEPTION MANAGEMENT (EM) STANDARD
12-01-2013
The main document looks at the communication requirements within the semiconductor manufacturing environment with respect to equipment exception handling. It defines capabilities to be provided by the exception agent for effective interaction and reporting with regards to abnormal situations in the equipment. The subordinate document: SEMI E41.1 "SECS-II Support for the Exception Management Standard" maps the data and services of its prime document SEMI E41 to SECS-II functions and streams and data definitions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
| SEMI D54 : 2009E | SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD) |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
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