SEMI E44 : 1996
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
GUIDE FOR PROCUREMENT AND ACCEPTANCE OF MINIENVIRONMENTS
01-03-2001
12-01-2013
Provides standardized procedures for the procurement and acceptance of minienvironments. It assists the buyer in producing a procurement specification by giving a structured overview and checklists of the parameters relating to procurement of minienvironments.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI D17 : 2000 | MECHANICAL SPECIFICATION FOR CASSETTES USED TO SHIP FLAT PANEL DISPLAY GLASS SUBSTRATES |
| 01/121101 DC : DRAFT MAR 2001 | BS EN ISO 14644-7 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 7: SEPARATIVE ENCLOSURES (CLEAN AIR HOODS, GLOVEBOXES, ISOLATORS, MINI-ENVIRONMENTS) |
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
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