SEMI D17 : 2000

Defines selected requirements of the cassettes used to ship flat panel display value-added substrates from the substrate finisher to the display maker and between process-added users. This standard is aimed at setting levels of definition for a reusable cassette to ship clean glass substrates and process-added substrates between organizations without compromising substrate integrity. It is intended to set an appropriate level of definition that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces with the transportation and automation cassettes' operating mode and substrate accessability with the same robotic elements. This cassette can be used in a "pass through" method.