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SEMI E44 : 1996

SEMI E44 : 1996

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

GUIDE FOR PROCUREMENT AND ACCEPTANCE OF MINIENVIRONMENTS

Withdrawn date

01-03-2001

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides standardized procedures for the procurement and acceptance of minienvironments. It assists the buyer in producing a procurement specification by giving a structured overview and checklists of the parameters relating to procurement of minienvironments.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

SEMI D17 : 2000 MECHANICAL SPECIFICATION FOR CASSETTES USED TO SHIP FLAT PANEL DISPLAY GLASS SUBSTRATES
01/121101 DC : DRAFT MAR 2001 BS EN ISO 14644-7 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 7: SEPARATIVE ENCLOSURES (CLEAN AIR HOODS, GLOVEBOXES, ISOLATORS, MINI-ENVIRONMENTS)
SEMI D18 : 1999E SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES

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