SEMI E48 : 2001(R2007)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SMIF INDEXER VOLUME REQUIREMENT
Published date
12-01-2013
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Provides the volume required within a tool to enable integration of SMIF into tools with multiple or single ports. It defines the space necessary within a tool with respect to the interface plane. The specification refers to the Standard Interface (SMIF) standard, SEMI E19.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (10/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
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