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  • SEMI E19 : APR 2017

    Current The latest, up-to-date edition.

    SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Gives one approach to interfacing a clean cassette transport box to a clean environmental housing on a piece of semiconductor processing equipment or to other clean environments.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes: SEMI E19.1, SEMI E19.2 & SEMI E19.3. SEMI E19.4 and SEMI E19.5 are no longer published within the SEMI E19 family of standards. They are published and sold separately on their own pages. (01/2005)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI M49 : 2016 GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 16 NM TECHNOLOGY GENERATIONS
    SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
    SEMI E45 : NOV 2001(R2007) TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS)
    SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
    01/121101 DC : DRAFT MAR 2001 BS EN ISO 14644-7 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 7: SEPARATIVE ENCLOSURES (CLEAN AIR HOODS, GLOVEBOXES, ISOLATORS, MINI-ENVIRONMENTS)
    SEMI E19.4 : 2017 SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF)
    SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
    SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
    SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
    SEMI M52 : 2014 GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS
    SEMI S28 : 2011 SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI E101 : 2004(R2010) GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL
    SEMI E103 : 2004 MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP
    SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI E48 : 2001(R2007) SPECIFICATION FOR SMIF INDEXER VOLUME REQUIREMENT
    SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
    SEMI T4 : 2001(R2013) SPECIFICATION FOR 150 MM AND 200 MM POD IDENTIFICATION DIMENSIONS
    DIN EN ISO 14644-7:2005-01 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004); German version EN ISO 14644-7:2004

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E1 : NOV 2010(R2016) SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS
    SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
    SEMI E111 : OCT 2017 SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE
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