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SEMI E48 : 2001(R2007)

SEMI E48 : 2001(R2007)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SMIF INDEXER VOLUME REQUIREMENT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides the volume required within a tool to enable integration of SMIF into tools with multiple or single ports. It defines the space necessary within a tool with respect to the interface plane. The specification refers to the Standard Interface (SMIF) standard, SEMI E19.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (10/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E19 : APR 2017 SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)
SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT

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