SEMI E49.8 : 2003(R2011)
Current
Current
The latest, up-to-date edition.
GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
12-01-2013
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Specifies guidelines for high purity (HP) and ultrahigh purity (UHP) gas distribution systems in semiconductor manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2003) Not available separately, Published within the SEMI E49 family of standards. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI F82 : 2012 | SPECIFICATION FOR DIMENSION OF MASS FLOW CONTROLLER/MASS FLOW METER FOR 1.125 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
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| SEMI F86 : 2012 | SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F92 : OCT 2012 | SPECIFICATION FOR DIMENSION OF COMPACT SIZE THREE PORT COMPONENTS FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
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| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI F81 : 2011(R2017) | SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI F73 : 2014 | TEST METHOD FOR SCANNING ELECTRON MICROSCOPY (SEM) EVALUATION OF WETTED SURFACE CONDITION OF STAINLESS STEEL COMPONENTS |
| SEMI F70 : 2011(R2017) | TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM |
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| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
| SEMI F60 : 2014 | TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS |
| SEMI F20 : 2006E(R2017) | SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI F58 : 2008 | TEST METHOD FOR DETERMINATION OF MOISTURE DRY-DOWN CHARACTERISTICS OF SURFACE-MOUNTED AND CONVENTIONAL GAS DELIVERY SYSTEMS BY ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY (APIMS) |
| SEMI E49.6 : 2003(R2011) | GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS |
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