SEMI E5 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-2)
Superseded date
02-03-2019
Superseded by
Published date
12-01-2013
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Specifies the details of the interpretation of messages exchanged between intelligent equipment and a host.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E148 : 2009(R2014) | SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT |
| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
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