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SEMI E5 : 2017

SEMI E5 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-2)

Superseded date

02-03-2019

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the details of the interpretation of messages exchanged between intelligent equipment and a host.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E148 : 2009(R2014) SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT
SEMI E6 : 2014 GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION
SEMI E4 : 1999(R2007) SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)
SEMI E37 : 2013 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES

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