SEMI E5 : 2019
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Available format(s)
Hardcopy
Superseded date
05-10-2020
Superseded by
Language(s)
English
Published date
02-03-2019
Important note : Users cannot be edited or removed once added to your Multi user PDF.The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E145:2014(R2019) | Classification for Measurement Unit Symbols in XML |
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