SEMI E54.16 : 2006
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS
01-05-2024
12-01-2013
Sets a communication specification based on the ANSI/EIA/CEA-709.1 Control Networking Protocol (LonWorks) to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on semiconductor manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI E54.6. (07/2005) Also available in CD-ROM. No longer published within the SEMI E54 family of standards. Published and sold separately on its own page. (02/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| Supersedes |
| SEMI E54.1 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL |
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E54.3 : 1998(R2016) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE |
| SEMI E54.10 : 2000(R2017) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE |
| SEMI E54.11 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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