SEMI E54.10 : 2000(R2017)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE
Published date
12-01-2013
Describes a network independent application model comprised of device objects that are common to all In-Situ Particle Monitor Devices on a semiconductor equipment Sensor/Actuator communications network.
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