SEMI E54.17 : 2006(R2011)
Current
Current
The latest, up-to-date edition.
SPECIFICATION OF SENSOR/ACTUATOR NETWORK FOR A-LINK
Published date
12-01-2013
Describes a communication specification based on the A-LINK protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.
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