SEMI E54.19 : 2008(R2014)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION OF SENSOR/ACUTUATOR NETWORK FOR MECHATROLINK
08-11-2018
12-01-2013
Defines how sensor/actuator/controller devices interoperate on the network specific for the MECHATROLINK Public specification referenced, as a part of equipment's control system.
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