SEMI E54.21 : 2010(R2017)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SENSOR ACTUATOR NETWORK FOR MOTIONNET COMMUNICATION
Published date
12-01-2013
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Specifies a communication specification based on the MOTIONNET[R] protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI E54.21. (12/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
| SEMI E54.1 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL |
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E54.18 : 2014 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE |
| SEMI E54.3 : 1998(R2016) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE |
| SEMI E54.10 : 2000(R2017) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE |
| SEMI E54.11 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES |
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