Customer Support: +353 (0)1 857 6730

Corporate Website About Us
  • There are no items in your cart
Please enter a keyword to search
Advanced search
Home
SEMI
SEMI E54.21 : 2010(R2017)

SEMI E54.21 : 2010(R2017)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SENSOR ACTUATOR NETWORK FOR MOTIONNET COMMUNICATION

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a communication specification based on the MOTIONNET[R] protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI E54.21. (12/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI E54.1 : 2016 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL
SEMI E54 : 2016 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
SEMI E54.18 : 2014 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE
SEMI E54.3 : 1998(R2016) SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE
SEMI E54.10 : 2000(R2017) SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE
SEMI E54.11 : 2016 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES

View more information
Sorry this product is not available in your region.

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Get in touch with us