SEMI E54.4 : 2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR DEVICENET
12-05-2022
12-01-2013
Specifies a Communication Specification based on the DeviceNet protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI-specified device models (common and device specific) in a semiconductor manufacturing tool.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2005) No longer published within the SEMI E54 family of standards. Published and sold separately on its own page. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E54.13 : 2011 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR ETHERNET/IP(TM) |
| SEMI E54.1 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL |
| SEMI E54.18 : 2014 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE |
| SEMI E54.3 : 1998(R2016) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE |
| SEMI E54.10 : 2000(R2017) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE |
| SEMI E54.11 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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