SEMI E81 : 2000(R2007)
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE
12-01-2013
Describes the Manufacturing Execution Systems (MES) domain that is the subject of the CIM Framework and to provide a reference for concepts that are common to the set of documents that specify the CIM Framework. Also defines the structure, relationships and interworkings of the components that together comprise the CIM Framework.
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