SEMI E81 : 2000(R2007)
Current
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE
Published date
12-01-2013
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Describes the Manufacturing Execution Systems (MES) domain that is the subject of the CIM Framework and to provide a reference for concepts that are common to the set of documents that specify the CIM Framework. Also defines the structure, relationships and interworkings of the components that together comprise the CIM Framework.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E105 : 2001 | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK SCHEDULING COMPONENT |
| SEMI E97 : 2000A(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK GLOBAL DECLARATIONS AND ABSTRACT INTERFACES |
| SEMI E96 : 2001(R2007) | GUIDE FOR CIM FRAMEWORK TECHNICAL ARCHITECTURE |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E35 : 2012 | GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E102 : 2000(R2006) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK MATERIAL TRANSPORT AND STORAGE COMPONENT |
| SEMI E133 : 2018 | SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE |
| SEMI E86 : 2000 | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK FACTORY LABOR COMPONENT |
| SEMI E102 : 2000(R2006) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK MATERIAL TRANSPORT AND STORAGE COMPONENT |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI E96 : 2001(R2007) | GUIDE FOR CIM FRAMEWORK TECHNICAL ARCHITECTURE |
| SEMI E42 : 2004 | RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES |
| SEMI E97 : 2000A(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK GLOBAL DECLARATIONS AND ABSTRACT INTERFACES |
| SEMI E32 : 1997 | MATERIAL MOVEMENT MANAGEMENT (MMM) |
| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
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