SEMI E99.1 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR CARRIER ID READER/WRITER FUNCTIONAL STANDARD
Published date
12-01-2013
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Describes the services and data of the Carrier ID Reader/Writer (CIDRW) standard to SECS-II streams and functions and data definitions. This document applies to all implementations of CIDRW that use the SECS-II message protocol (SEMI E5).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2003) Not available separately, Published within the SEMI E99 family of standards. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
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