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SEMI E99.1 : 2004(R2010)

SEMI E99.1 : 2004(R2010)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR CARRIER ID READER/WRITER FUNCTIONAL STANDARD

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the services and data of the Carrier ID Reader/Writer (CIDRW) standard to SECS-II streams and functions and data definitions. This document applies to all implementations of CIDRW that use the SECS-II message protocol (SEMI E5).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2003) Not available separately, Published within the SEMI E99 family of standards. (07/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS

SEMI E4 : 1999(R2007) SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)

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