SEMI F102 : 2006(R2013)
Current
Current
The latest, up-to-date edition.
GUIDE FOR SELECTING SPECIFICATIONS FOR DIMENSION OF COMPONENTS FOR SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
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Sets up guide for selecting "Specifications for Dimension of Components for Surface Mount Gas Distribution Systems."
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI F86 : 2012 | SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F94 : OCT 2012 | SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH FOUR FASTENER CONFIGURATION TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F89 : 2012 | SPECIFICATION FOR DIMENSION OF COMPACT SIZE MASS FLOW CONTROLLERS AND MASS FLOW METERS FOR 1.5 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F95 : OCT 2012 | SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS FOR 1.5 INCH FOUR FASTENER CONFIGURATION TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F93 : OCT 2012 | SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.5 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F84 : 2012 | SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F88 : 2012 | SPECIFICATION FOR DIMENSION OF STANDARD SIZE MASS FLOW CONTROLLERS AND MASS FLOW METERS FOR 1.5 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F92 : OCT 2012 | SPECIFICATION FOR DIMENSION OF COMPACT SIZE THREE PORT COMPONENTS FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F85 : 2012 | SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F90 : OCT 2012 | SPECIFICATION FOR DIMENSION OF STANDARD SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F87 : 2012 | SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F82 : 2012 | SPECIFICATION FOR DIMENSION OF MASS FLOW CONTROLLER/MASS FLOW METER FOR 1.125 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F91 : OCT 2012 | SPECIFICATION FOR DIMENSION OF COMPACT SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F83 : 2012 | SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
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