SEMI F33 : 2008
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)
Published date
12-01-2013
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Provides guidelines for the calibration of the APIMS for measurement of impurities in nitrogen, argon, helium and hydrogen. Also provides guidelines for application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (06/2008)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI F58 : 2008 | TEST METHOD FOR DETERMINATION OF MOISTURE DRY-DOWN CHARACTERISTICS OF SURFACE-MOUNTED AND CONVENTIONAL GAS DELIVERY SYSTEMS BY ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY (APIMS) |
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| SEMI F67 : 2001(R2013) | TEST METHOD FOR DETERMINING INERT GAS PURIFIER CAPACITY |
| SEMI C55 : 2004(R2018) | SPECIFICATION FOR LIQUID CARBON DIOXIDE (CO[2]) USED IN NEAR CRITICAL, CRITICAL AND SUPERCRITICAL APPLICATIONS, >/ 99.99% QUALITY |
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| SEMI C15 : 2016 | TEST METHOD FOR PPM AND PPB HUMIDITY STANDARDS |
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