SEMI F33 : 2008
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)
Published date
12-01-2013
Provides guidelines for the calibration of the APIMS for measurement of impurities in nitrogen, argon, helium and hydrogen. Also provides guidelines for application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time.
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