SEMI F48 : 2000(R2014)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING TRACE METALS IN POLYMER MATERIALS
Published date
12-01-2013
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Specifies a procedure for determining the nonvolatile trace inorganic impurities in bulk polymeric materials.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI C69 : 2015 | TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS |
| SEMI C90 : 2015 | TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
| SEMI F40-0699E(R2018) | PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING |
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