SEMI F95 : OCT 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS FOR 1.5 INCH FOUR FASTENER CONFIGURATION TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
Sorry this product is not available in your region.
Sets up the properties and physical of two port components for 1.5 inch type surface mount gas distribution systems.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI (02/2004) Supersedes SEMI PR3. (09/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI F102 : 2006(R2013) | GUIDE FOR SELECTING SPECIFICATIONS FOR DIMENSION OF COMPONENTS FOR SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F20 : 2006E(R2017) | SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI E49.8 : 2003(R2011) | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.