SEMI HB1 : 2016
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The latest, up-to-date edition.
SPECIFICATION FOR SAPPHIRE WAFERS INTENDED FOR USE FOR MANUFACTURING HIGH BRIGHTNESS-LIGHT EMITTING DIODE DEVICES
Published date
07-02-2013
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Includes dimensional, wafer preparation, and crystallographic orientation characteristics for five categories of single-crystal single-side polished sapphire wafers used in HB-LED manufacturing.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2013)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
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