SEMI M17 : 2010(R2015)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GUIDE FOR A UNIVERSAL WAFER GRID
09-12-2021
12-01-2013
Specifies a grid pattern that is useful for quantifying surface defects on a nominally circular semiconductor wafer. The grid is defined such that it contains 1000 elements of approximately equal area. Also provides a design for and guidance for use of a wafer grid that facilitates the determination of the fraction of the wafer surface area covered by observed defects.
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