Name: SEMI MF154 : 2005(R2016)
Brand: SEMI

GUIDE FOR IDENTIFICATION OF STRUCTURES AND CONTAMINANTS SEEN ON SPECULAR SILICON SURFACES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Displays, explains & gives reference for various characteristic features and contaminants that are seen on highly specular silicon wafers.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI MF154 : 2005(R2016)