SEMI M32 : 2007
Current
Current
The latest, up-to-date edition.
GUIDE TO STATISTICAL SPECIFICATIONS
Published date
12-01-2013
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Describes an explicit specification form that defines the risk level as a part of parametric specifications.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI M18 : 2012 | GUIDE FOR DEVELOPING SPECIFICATION FORMS FOR ORDER ENTRY OF SILICON WAFERS |
| SEMI M57 : 2016 | SPECIFICATION FOR SILICON ANNEALED WAFERS |
| SEMI M61 : 2007(R 2019) | SPECIFICATION FOR SILICON EPITAXIAL WAFERS WITH BURIED LAYERS |
| SEMI M62 : 2017 | SPECIFICATIONS FOR SILICON EPITAXIAL WAFERS |
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