SEMI M61 : 2007(R 2019)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SILICON EPITAXIAL WAFERS WITH BURIED LAYERS
Hardcopy
16-11-2023
English
12-01-2013
Describes the properties of silicon epitaxial wafers with buried layers that relate to the characteristics of photolithography, buried layer, and buried layer pattern after the deposition of the epitaxial layer.
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