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SEMI M44 : 2005(R2011)

SEMI M44 : 2005(R2011)

Current

Current

The latest, up-to-date edition.

GUIDE TO CONVERSION FACTORS FOR INTERSTITIAL OXYGEN IN SILICON

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the compilation of the conversion and calibration factors used in standards established by various organizations since 1970 for the measurement of interstitial oxygen in silicon.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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