SEMI M47 : 2007
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR SILICON-ON-INSULATOR (SOI) WAFERS FOR CMOS LSI APPLICATIONS
Withdrawn date
01-11-2010
Published date
12-01-2013
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Defines thin-layer silicon-on-insulator (SOI) wafer requirements for CMOS large scale integrated circuit (LSI) devices.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001) Also available in CD-ROM. (06/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
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